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| Semiconductor |
 Ionics
Instruments is simplifying the toughest analytical challenges
being addressed in microelectronics UPW systems. On-line,
continuous boron monitoring with the Sievers UPW Boron
Analyzer, and the most accurate and advanced TOC analyzer
available¡ªthe Sievers PPT TOC Analyzer¡ªare just
two of the ways in which Ionics Instruments is helping
to ensure the highest quality UPW product and providing
the maximum protection for the most sensitive fabrication
processes. And the Sievers 800 Turbo has been specifically
designed to address the industry's reclaim requirements,
offering maximum protection against even the shortest
TOC spikes.
Boron in Ultrapure Water
Numerous published papers have documented that in a typical
UPW system, boron is the first contaminant to be released
from a mixed-resin bed, preceding silica by a significant
period of time.
At the point of measurable increases in silica concentration,
boron breakthrough has typically been underway for a prolonged
period of time, causing significant exposure to processes
that may be sensitive to boron intrusion. Until recently,
however, there was no convenient on-line means of accurately
measuring boron at the low parts-per-trillion levels necessary
for determination of mixed-bed exhaustion. With the introduction
of Sievers UPW Boron Analyzer¡ªan instrument capable
of up to 10 analyses per hour with a detection limit of
15 ppt B¡ªprediction of mixed-bed exhaustion, optimization
of EDI performance and control over polish loop boron
levels is as simple as installing the instrument, turning
it on and collecting the data. The UPW Boron Analyzer
achieves the same sensitivity of ICP-MS, has demonstrated
better accuracy and does so at a fraction of the cost
and without the need for an operator. Applying the analyzer
to limit boron loading of non-regenerable polishing resins
significantly extends the life of those resins, saving
more than the cost of the analyzer in a short period of
time.
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Identification
of Criticalcontaminants by Applying An Understanding of
Different TOC Measuring Technologies
Standard
Guide for Ultra Pure Water Used in the Electronics and
Semiconductor Industry
Undetectable
TOC in UPW Can Influence DUV Photolithography Processes
Using
Sievers Model 800 TOC Analyzer in Cleaning Validation
Applications
Standard
Test Method for On-Line Monitoring of Total Carbon,Inorganic
Carbon in Water by Ultraviolet,Persulfate Oxidation,and
Menbrane Conductivity Detection
Standard
Test Method for Low Level Determination of Total Carbon,Inorganic
Carbon and Organic Carbon in Water by Ultraviolet,Persulfate
Oxidation,and Menbrane Conductivity Detection
Standard
Test Method for Total Carbon,Inorganic Corbon,and Organic
Corbon in Water by Ultraviolet, Persulfate Oxidation and
Membrane Conductivity Detection |
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